可逆吸着相にある真空系の排気特性のモデリング

• 赤石 憲也

  核融合科学研究所

書誌事項

タイトル別名

• Modeling of the Pumping Down of a Vacuum System of a Reversibly-adsorbed Phase.
• カギャク キュウチャクソウ ニ アル シンクウケイ ノ ハイキ トクセイ ノ モデリング

抄録

In order to consider the outgassing behavior in the pump-down of a vacuum system of a reversibly adsorbed phase, modeling of the pump-down based on the Temkin isotherm was attempted. In the modeling, two variables of relative surface coverage θ and gas density n are used, and a set of the conservation of mass equations which predicts changing rates of θ and n with time during pumping down, were derived. By combining the two equations, solutions of θ (t) and n (t) were derived analytically as a function of time. Then, using the solution n (t) , the measured outgassing rate q (t) was expressed as a product of a pumping speed dependent term and a time dependent term. In addition, it was shown that the theoretical outgassing expression can consistently explain the experimental results for the dependence of the outgassing rate on pumping speed, which were observed in the pump down of a 304 stainless steel chamber and a TiN coated 304 stainless chamber after exposure to moist air.

収録刊行物

• 真空

  真空 42 (6), 620-627, 1999

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679041767040
• NII論文ID: 10004568085
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.42.620
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 4773259
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4773259
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可