Al/TiN2層薄膜の微小押し込み硬さ試験におけるエネルギー散逸 Energy Dissipation in Al/TiN Double Layered Films by Nano-indentation

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An energetic approach in nano-indentation process using a Berkovich type indenter was applied to the evaluation of mechanical properties of thin films. Double layered Al/TiN films were deposited onto glass substrates by dc-magnetron sputtering apparatus. Thickness of the TiN upper layer was 500 nm, while that of Al bottom layer varied from 0 to 500 nm. The deformation energy caused by the indentation was obtained from the area of load-displacement curves indicated during the nano-indentation process. The deformation energy of the thin films was divided into elastic and plastic components. The elastic energy of the films showed constant values at each indentation load. Dissipated energy, however, increased with increasing Al thickness. This result suggests that the elastic deformation mainly takes place in the TiN layer and the plastic deformation does in the Al layer.

収録刊行物

  • 真空

    真空 42(7), 652-656, 1999-07-20

    The Vacuum Society of Japan

参考文献:  14件中 1-14件 を表示

  • <no title>

    PHARR G. M.

    MRS Bulletin July, 28, 1992

    被引用文献1件

  • <no title>

    LEHOCZKY S. L.

    Phys.Rev.Lett. 41, 1814, 1978

    被引用文献3件

  • <no title>

    SPRINGER R. W.

    Thin Solid Films 54, 197, 1978

    被引用文献3件

  • <no title>

    HELMERSSON U.

    J.Appl.Phys. 62, 481, 1987

    被引用文献6件

  • <no title>

    SHINN M.

    J. Mater. Res. 7, 901, 1992

    被引用文献7件

  • <no title>

    CHU X.

    Surf.Coat.Technol. 61, 251, 1993

    被引用文献3件

  • <no title>

    KUSANO E.

    J.Vac.Soc.Technol. A16, 1272, 1998

    被引用文献3件

  • <no title>

    KUSANO E.

    Nanostruct.Mater.

    被引用文献2件

  • <no title>

    KUSANO E.

    Mat.Res.Soc.Symp.Proc. 505, 577, 1998

    被引用文献3件

  • <no title>

    北河勝

    真空 41, 115, 1998

    被引用文献4件

  • <no title>

    広瀬幸雄

    基礎材料工学 52, 1993

    被引用文献1件

  • <no title>

    CHU X.

    J.Appl.Phys. 77, 4403, 1995

    被引用文献8件

  • <no title>

    PIERSON Hugh O.

    Handbook of refractory carbides and nitrides 150, 1996

    被引用文献1件

  • <no title>

    LEHOCZKY S. L.

    J. App. Phys. 49, 5479, 1978

    DOI 被引用文献6件

各種コード

  • NII論文ID(NAID)
    10004568125
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    05598516
  • NDL 記事登録ID
    4799958
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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