電界制御熱陰極マグネトロン真空計の開発 Development of A New Hot Cathode Magnetron Gauge with Electric Field Controlling
We have developed a new type of magnetron gauge to obtain linear response of the ion current to the pressure in a wider range with a higher sensitivity. The gauge is equipped with two ion collectors while the ratio of the ion currents is measured and kept constant with a feed-back control of the filament heating voltage. The constant ratio, e.g. 0.4 in a range between 3×10<SUP>-2</SUP> and 2×10<SUP>-9</SUP> Pa, resulted from a geometrically similar generation of ions, hence from a spatial electron distribution independent of the pressure. In this report we describe the principle, the design, and results of the new type of magnetron gauge, by comparing them with those of conventional types and of B-A gauges.
真空 42(9), 827-833, 1999-09-20
The Vacuum Society of Japan