Development of A New Hot Cathode Magnetron Gauge with Electric Field Controlling.
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- ASAMAKI Tatsuo
- Department of Electrical Engineering, Science University of Tokyo
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- YAMAGUCHI Tatsuya
- Department of Electrical Engineering, Science University of Tokyo
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- UDAGAWA Hiroshi
- Department of Electrical Engineering, Science University of Tokyo
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- TAKEUCHI Michiro
- Department of Electrical Engineering, Science University of Tokyo
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- UCHIYAMA Takashi
- Department of Electrical Engineering, Science University of Tokyo
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- KAMATA Yukiko
- Department of Electrical Engineering, Science University of Tokyo
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- HOTOTA Asami
- Department of Electrical Engineering, Science University of Tokyo
Bibliographic Information
- Other Title
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- 電界制御熱陰極マグネトロン真空計の開発
- デンカイ セイギョ ネツ インキョク マグネトロン シンクウケイ ノ カイハツ
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Abstract
We have developed a new type of magnetron gauge to obtain linear response of the ion current to the pressure in a wider range with a higher sensitivity. The gauge is equipped with two ion collectors while the ratio of the ion currents is measured and kept constant with a feed-back control of the filament heating voltage. The constant ratio, e.g. 0.4 in a range between 3×10-2 and 2×10-9 Pa, resulted from a geometrically similar generation of ions, hence from a spatial electron distribution independent of the pressure. In this report we describe the principle, the design, and results of the new type of magnetron gauge, by comparing them with those of conventional types and of B-A gauges.
Journal
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- Shinku
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Shinku 42 (9), 827-833, 1999
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001204065104256
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- NII Article ID
- 10004568444
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 4872293
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed