イオンプレーティングTiN被覆一方向性珪素鋼板の磁気特性とTiN膜質の変化:プラズマ発生法による相違 [in Japanese] Variation of Magnetic Properties of TiN-Coated Grain Oriented Silicon Steel Sheet and Properties of TiN Films due to Difference of Plasma Coating Methods [in Japanese]
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The magnetic properties of the TiN-coated silicon steel sheets were evaluated. TiN films were prepared by using three methods such as hollow cathode discharge (HCD), electron beam (EB) evaporation combined with HCD (EB+HCD) and EB combined radio frequency (RF) discharge (EB+RF). X-ray diffraction, color monitoring, Ti/N mass ratio analysis and observations of the scanning electron microscope were also carried out.<BR>The magnetic flux density (B<SUB>8</SUB>) and iron loss (W<SUB>17/50</SUB>) of the TiN-coated silicon steel sheets were remarkably improved. For comparison of W<SUB>17/50</SUB> improvement for the HCD method, it was about 70% higher for the EB+HCD method and about 50% higher for the EB+RF method.<BR>Scanning electron microscopic observation revealed fine and smooth TiN films for the HCD method, intermediate one for the EB+HCD, and a convex and concave one for the EB+RF.<BR>X-ray diffraction inspection for the HCD method showed a strong peak of (111) of TiN, while that for the EB+HCD showed comparatively strong (111), and that for the EB+RF showed strong (200), (111) and (110) peaks and weak (311) and (222) peaks.
- Journal of the Vacuum Society of Japan
Journal of the Vacuum Society of Japan 42(9), 845-849, 1999-09-20
The Vacuum Society of Japan