Magnetic Neutral Loop Discharge Plasma. (I). Characteristics of the Plasma.

• UCHIDA Taijiro

  ULVAC Japan Ltd.

Bibliographic Information

Other Title

• 磁気中性線放電ブラズマ　（Ｉ）　　プラズマの特徴
• カイセツ ジキ チュウセイセン ホウデン プラズマ 1 プラズマ ノ トクチョウ
• Characteristics of the Plasma
• プラズマの特徴

Journal

• Shinku

  Shinku 42 (12), 1071-1075, 1999

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390001204065044096
• NII Article ID: 10004568836
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.42.1071
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 4951893
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4951893
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles