Applications of Electromagnetic Acceleration Plasma Generators for Titanium Nitride Reactive Coatings

• SHIBATA Tetsuji

  Faculty of Engineering Science, Osaka University

• TAHARA Hirokazu

  Faculty of Engineering Science, Osaka University

• YASUI Toshiaki

  Faculty of Engineering Science, Osaka University

• KAGAYA Yoichi

  Faculty of Engineering Science, Osaka University

• YOSHIKAWA Takao

  Faculty of Engineering Science, Osaka University

Bibliographic Information

Other Title

• 電磁加速プラズマ発生装置の窒化チタン反応性成膜への応用

Journal

• 全国講演大会講演論文集

  全国講演大会講演論文集 69 37-38, 1999-06-17

Details

• CRID: 1573105974049905792
• NII Article ID: 10004575621
• NII Book ID: AA11461805
• Text Lang: ja
• Data Source:
  • CiNii Articles