Diamond Film Formation by OH Radical Injection from Remote Microwave H2/ H2O Plasma into Parallel-Plate RF Methanol Plasma

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著者

    • Goto Toshio
    • Department of Quantum Engineering, School of Engineering, Nagoya University,
    • Yamada Koji
    • Department of Electrical and Electronic Engineering, Faculty of Science and Technology, Meijo University,
    • Hiramatsu Mineo
    • Department of Electrical and Electronic Engineering, Faculty of Science and Technology, Meijo University,
    • Nawata Masahito
    • Department of Electrical and Electronic Engineering, Faculty of Science and Technology, Meijo University,

抄録

Diamond film was successfully synthesized for the first time using a parallel-plate radio-frequency (RF 13.56 MHz) methanol ( CH3OH) plasma assisted by injection of hydrogen (H) and hydroxyl (OH) radicals generated by microwave H2/ H2O plasma. OH radical, in addition to H radical, injection into RF CH3OH plasma enhanced selective diamond growth and selective etching of the nondiamond phase. The effects of OH radical injection on the initial and growth stages of the diamond formation were investigated by changing H2O partial pressure in the microwave plasma. It was found that OH radical injection into RF CH3OH plasma enhanced the growth of diamond in the initial stage.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes  

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 35(9A), 4826-4832, 1996-09-15 

    Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyo

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各種コード

  • NII論文ID(NAID)
    10004613611
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    ART
  • 雑誌種別
    大学紀要
  • ISSN
    0021-4922
  • NDL 記事登録ID
    4060177
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z53-A375
  • データ提供元
    CJP書誌  NDL  JSAP 
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