YiN Film Deposition Using Electromagnetic Acceleration Plasma and Its Plasma Spectroscopic Measurements

Bibliographic Information

Other Title
  • 電磁加速プラズマによる窒化チタン成膜とそのプラズマ分光測定

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Journal

Details

  • CRID
    1570291224291916544
  • NII Article ID
    10004659165
  • NII Book ID
    AN00080051
  • ISSN
    03871096
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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