ECR Plasma Sputtering Source Using Slot Antennas and Permanent Magnets
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- YASUI Toshiaki
- Graduate School of Engineering Science, Osaka University
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- TAHARA Hirokazu
- Graduate School of Engineering Science, Osaka University
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- YOSHIKAWA Takao
- Graduate School of Engineering Science, Osaka University
Bibliographic Information
- Other Title
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- 永久磁石とスロットアンテナを用いたECRプラズマスパッタリング源
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Journal
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- 高温学会誌
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高温学会誌 26 (4), 6-, 2000-07-20
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Details 詳細情報について
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- CRID
- 1570291224291980672
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- NII Article ID
- 10004659437
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- NII Book ID
- AN00080051
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- ISSN
- 03871096
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- Text Lang
- ja
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- Data Source
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- CiNii Articles