クリーンルーム空気中およびウエハ表面上の有機汚染物の分析 Analysis of Organic Contaminants in Cleanroom Air and on Silicon Wafer Surface

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Concentrations of organic contaminants (hereafter abbreviated as ORCs) in cleanroom air were measured regularly since operations in a new cleanroom were started. Concentrations of ORCs in cleanroom air gradually decreased and attained steady state values after six months. The removal efficiency of a chemical filter for total ORCs was significantly reduced with time, however the efficiencies for di (2-ethylhexyl) phthalate (DOP) , di (isobutyl) phthalate and low molecular weight cyclosiloxanes (LMCSs) remained at a sufficiently high value for three years. The sticking probabilities of DOP and Trichloroethylphosphate onto Si surface were estimated to be 1 × 10<SUP>-2</SUP> and 5 × 10<SUP>-3</SUP> from the concentrations of ORCs in the air and the masses of ORCs deposited on Si wafers.

収録刊行物

  • エアロゾル研究 = Journal of aerosol research

    エアロゾル研究 = Journal of aerosol research 15(1), 43-49, 2000-03-20

    日本エアロゾル学会

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各種コード

  • NII論文ID(NAID)
    10004667964
  • NII書誌ID(NCID)
    AN10041511
  • 本文言語コード
    JPN
  • 資料種別
    NOT
  • ISSN
    09122834
  • NDL 記事登録ID
    5325725
  • NDL 雑誌分類
    ZP5(科学技術--化学・化学工業--化学工学)
  • NDL 請求記号
    Z17-1062
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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