マイクロシリカ粒子の静電気力による配列プロセス Arranging Process of Micro Sized Silica Particles Using Electrification

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Assembly of particles is one of the build-up methods for fabrication of organized structures in the range from micro- to nanometer scales. We have been developing a new technique to assemble microscale particles for the fabrication of two-dimensionally controlled micro structures. The procedure is as follows : an electrified pattern is formed on a dielectric substrate by scanning charging beams. Tne substrate is then dipped into a suspension in which the particles are dispersed. The particles are arrayed on the electrified pattern. In this paper, we investigated the electrostaric force which attracts the particles in the suspension. Spherical silica particles of 5 μm diameter were used as model particles, and the particles were charged in negative polarity in the suspension. The particles were deposited on both the negatively and positively charged patterns. This result suggests that gradient force plays an important role in attracting particles. The electrostatic forces for a particle in the suspension were calculated using numerical analysis. The result showed that the gradient force is larger than the Coulomb force near the electrified pattern.

収録刊行物

  • エアロゾル研究 = Journal of aerosol research  

    エアロゾル研究 = Journal of aerosol research 15(2), 93-101, 2000-06-20 

    日本エアロゾル学会

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各種コード

  • NII論文ID(NAID)
    10004668002
  • NII書誌ID(NCID)
    AN10041511
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09122834
  • NDL 記事登録ID
    5381407
  • NDL 雑誌分類
    ZP5(科学技術--化学・化学工業--化学工学)
  • NDL 請求記号
    Z17-1062
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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