マイクロシリカ粒子の静電気力による配列プロセス

• 不動寺 浩

  科学技術庁金属材料技術研究所第5研究グループ

• 小林 幹彦

  科学技術庁金属材料技術研究所第5研究グループ

• 新谷 紀雄

  科学技術庁金属材料技術研究所第5研究グループ

書誌事項

タイトル別名

• Arranging Process of Micro Sized Silica Particles Using Electrification
• マイクロシリカ リュウシ ノ セイデンキリョク ニ ヨル ハイレツ プロセス

抄録

Assembly of particles is one of the build-up methods for fabrication of organized structures in the range from micro- to nanometer scales. We have been developing a new technique to assemble microscale particles for the fabrication of two-dimensionally controlled micro structures. The procedure is as follows : an electrified pattern is formed on a dielectric substrate by scanning charging beams. Tne substrate is then dipped into a suspension in which the particles are dispersed. The particles are arrayed on the electrified pattern. In this paper, we investigated the electrostaric force which attracts the particles in the suspension. Spherical silica particles of 5 μm diameter were used as model particles, and the particles were charged in negative polarity in the suspension. The particles were deposited on both the negatively and positively charged patterns. This result suggests that gradient force plays an important role in attracting particles. The electrostatic forces for a particle in the suspension were calculated using numerical analysis. The result showed that the gradient force is larger than the Coulomb force near the electrified pattern.

収録刊行物

• エアロゾル研究

  エアロゾル研究 15 (2), 93-101, 2000

  日本エアロゾル学会

キーワード

• Silica Particle
• Arrangement
• Electrified Pattern
• Zeta Potential
• Electrostatic Gradient Force
• Coulomb Force
• Numerical Analysis

詳細情報

• CRID: 1390282679319075456
• NII論文ID: 10004668002
• NII書誌ID: AN10041511
• DOI: 10.11203/jar.15.93
• COI: 1:CAS:528:DC%2BD3cXksFOlu74%3D
• ISSN: 1881543X
• ISSN: 09122834
• NDL書誌ID: 5381407
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5381407
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可