コンベイヤからの発塵粒子の特性とクリーンエレベータ用粒子除去ユニットの考案 Characteristics of Particles Generated from Conveyors and Development of a Particle Collection Device for Clean Elevators

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In semiconductor manufacturing processes, product transport between cleanrooms has recently become inevitable with an increase of process steps to make devices with finer dimensions and a higher integrity. This work aims at developing a particle collection device for a clean elevator. We first characterized particles generated from actuating parts of transport equipment such as roller conveyors. We measured generation rate and charge distribution of particles released from the equipment. These measurements showed that the generated particles consist of fairly large number of submicrometer particles with more than 90 % of charged fraction. Based on this finding, we designed a particle collection device composed of parallel plate electrodes and dielectric fibers, and evaluated experimentally. It found that the performance of the device can be estimated by the conventional filtration theory.

収録刊行物

  • エアロゾル研究 = Journal of aerosol research  

    エアロゾル研究 = Journal of aerosol research 14(4), 338-347, 1999-12-20 

    日本エアロゾル学会

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各種コード

  • NII論文ID(NAID)
    10004668293
  • NII書誌ID(NCID)
    AN10041511
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09122834
  • NDL 記事登録ID
    4946917
  • NDL 雑誌分類
    ZP5(科学技術--化学・化学工業--化学工学)
  • NDL 請求記号
    Z17-1062
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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