コンベイヤからの発塵粒子の特性とクリーンエレベータ用粒子除去ユニットの考案

DOI Web Site 被引用文献1件 参考文献7件

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  • Characteristics of Particles Generated from Conveyors and Development of a Particle Collection Device for Clean Elevators
  • コンベイヤ カラ ノ ハツ ジン リュウシ ノ トクセイ ト クリーンエレベータヨウ リュウシ ジョキョ ユニット ノ コウアン

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In semiconductor manufacturing processes, product transport between cleanrooms has recently become inevitable with an increase of process steps to make devices with finer dimensions and a higher integrity. This work aims at developing a particle collection device for a clean elevator. We first characterized particles generated from actuating parts of transport equipment such as roller conveyors. We measured generation rate and charge distribution of particles released from the equipment. These measurements showed that the generated particles consist of fairly large number of submicrometer particles with more than 90 % of charged fraction. Based on this finding, we designed a particle collection device composed of parallel plate electrodes and dielectric fibers, and evaluated experimentally. It found that the performance of the device can be estimated by the conventional filtration theory.

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