Application of a Bias-Current Modulation Technique to Radio-Frequency Glow Discharge Optical Emission Spectrometry.

• WAGATSUMA Kazuaki

  The Institute for Materials Research, Tohoku University

• MATSUTA Hideyuki

  The Institute for Materials Research, Tohoku University

抄録

A 13.56-MHz Grimm-style glow discharge plasma in which pulsated bias currents are introduced was investigated con-cerning the analytical applications. The d.c. bias currents driven by a self-bias potential are conducted through the r.f. plasma body by using a low-pass filter circuit and a variable resistor. Excitation by a modified r.f. plasma can yield larger emission intensities. By modulating the bias current associated with phase-sensitive detection, the emission inten-sities can be measured at very low noise levels, enabling the detection limit to be improved more. A detection limit of 3×10^-4 mass % was obtained for Mn determination in Fe-based binary alloy samples, whereas 1.4×10^-2 mass % Mn was obtained in the conventional excitation of an 80-W r.f. discharge plasma.

収録刊行物

• Analytical Sciences

  Analytical Sciences 15 (6), 517-523, 1999

  社団法人 日本分析化学会

キーワード

• Analytical Chemistry

詳細情報

• CRID: 1390282679229032704
• NII論文ID: 130004440069
• NII論文ID: 10004706292
• NII書誌ID: AA10500785
• DOI: 10.2116/analsci.15.517
• COI: 1:CAS:528:DyaK1MXjsl2qurk%3D
• ISSN: 13482246
• ISSN: 09106340
• ISSN: http://id.crossref.org/issn/09106340
• HANDLE: 10097/51713
• NDL書誌ID: 4761994
• Web Site: https://tohoku.repo.nii.ac.jp/records/43988
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4761994
• Web Site: https://link.springer.com/content/pdf/10.2116/analsci.15.517.pdf
• Web Site: https://link.springer.com/article/10.2116/analsci.15.517/fulltext.html
• Web Site: http://www.jstage.jst.go.jp/article/analsci/15/6/15_6_517/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • IRDB
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可