片側ダンピング式集積形加速度センサ Air Damping Characteristics of Integrated Accelerometers with a Single-Side Air Gap

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In this paper, damping characteristics of piezoresistive integrated silicon accelerometers, in which a micromachined seismic mass is suspended by four narrow beams from the surrounding frame that incorporates peripheral circuitry and squeeze film damping effect is provided by a single-side air gap under the seismic mass, were analyzed and numerically calculated. The output waveforms for applied sinusoidal accelerations are different from those of accelerometers with symmetrical air-gap structure when subject to large accelerations. The calculated results are compared with measured characteristics of the fabricated devices.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 117(2), 75-79, 1997-02 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004831940
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4128884
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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