Air Damping Characteristics of Integrated Accelerometers with a Single-Side Air Gap.

• Muro H.

  Nissan Motor Co., Ltd.

• Kiyota S.

  Nissan Motor Co., Ltd.

• Uchikoshi S.

  Nissan Motor Co., Ltd.

• Himeno R.

  Nissan Motor Co., Ltd.

書誌事項

タイトル別名

• Air Damping Characteristics of Integrat

抄録

In this paper, damping characteristics of piezoresistive integrated silicon accelerometers, in which a micromachined seismic mass is suspended by four narrow beams from the surrounding frame that incorporates peripheral circuitry and squeeze film damping effect is provided by a single-side air gap under the seismic mass, were analyzed and numerically calculated. The output waveforms for applied sinusoidal accelerations are different from those of accelerometers with symmetrical air-gap structure when subject to large accelerations. The calculated results are compared with measured characteristics of the fabricated devices.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 117 (2), 75-79, 1997

  一般社団法人 電気学会

キーワード

• accelerometer
• micromachining
• integrated sensor
• air damping
• squeeze-film effect

詳細情報

• CRID: 1390282679437955968
• NII論文ID: 10004831940
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.117.75
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 4128884
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4128884
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/117/2/117_2_75/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可