封止されたマイクロメカニカルデバイスのダンピング制御 Damping Control for Packaged Micro Mechanical Devices

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Damping control for packaged micro mechanical devices, such as an accelerometer, is desired to achieve wide frequency range by preventing the overdamping and suppressing the resonance. For capacitive detection type devices, which have narrow gap in a sealed cavity, the control of the cavity pressure is required for the damping control. We developed a novel cavity pressure control method using non-evaporable getters (NEG) and inert gas in anodically bonded glass-silicon structure. From the experiments using deflection of thin silicon diaphragm, the cavity pressure could be controlled at 120 and 5900Pa as designed. In application to the accelerometer, vibration behavior of seismic mass was studied experimentally and simulated by using Molecular Gas film Lubrication (MGL) equation. The result indicates that the critical damping under controlled pressure can be well designed to achieve wide frequency range.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 117(2), 109-116, 1997-02 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004832007
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4128891
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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