Diode Integrated Capacitive Accelerometer with Reduced Structural Distortion
収録刊行物
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- Digest of Technical Papers. The 8th Int. Conf. on Solid-State Sensors and Actuators, Transducers'95
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Digest of Technical Papers. The 8th Int. Conf. on Solid-State Sensors and Actuators, Transducers'95 581-584, 1995