3次元配線アレイの開発 3 Dimensional Wire Array for Connection between Multi Layers
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We have proposed the concept of distributed micro motion systems (DMMS) composed of micro cell array. We focused on the multi-layered fabrication process to integrate such micro devices as actuators, sensors and circuits for implementation of a micro cell array. In this case, each devices are produced on a separate substrate and connected together after fabrication. This paper describes the 3 dimensional (3-D) wire array which have been developed for the interconnection between these substrates.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 117(3), 160-164, 1997-03
The Institute of Electrical Engineers of Japan