Fabrication and Experiment of Novel Type Electrohydrodynamic Micropump
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A novel driving theory on the induction type electrohydrodynamic (EHD) pump driven by traveling electric fields without the temperature gradient is proposed. The equations of the generating pressure and the flow rate are derived. The EHD micropump is fabricated by micromachining technology and tested. The channel heights are 50μm, 100μm and 200μm respectively and the channel width is 3mm. The spacing and width of the electrodes are 40μm respectively. The maximum pressure is 70.3Pa, 35.4Pa and 17.2Pa at the frequency of 0.2Hz for each. channel height (50μm, 100μm and 200μm) and the maximum flow rate is 0.90×10<sup>-1</sup>μ<i>l</i>/min, 1.88×10<sup>-1</sup>μ<i>l</i>/min and 4.85×10<sup>-1</sup>μ<i>l</i>/min at the frequency of 0.4Hz for each channel height.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 117(3), 170-174, 1997-03
The Institute of Electrical Engineers of Japan