Fabrication and Experiment of Novel Type Electrohydrodynamic Micropump.

• Choi Jin-Woo

  Center for Microelectronic Sensors and MEMS, University of Cincinnati

• Kim Yong-Kweon

  School of Electrical Engineering, Seoul National University

書誌事項

タイトル別名

• Fabrication and Experiment of Novel Typ

抄録

A novel driving theory on the induction type electrohydrodynamic (EHD) pump driven by traveling electric fields without the temperature gradient is proposed. The equations of the generating pressure and the flow rate are derived. The EHD micropump is fabricated by micromachining technology and tested. The channel heights are 50μm, 100μm and 200μm respectively and the channel width is 3mm. The spacing and width of the electrodes are 40μm respectively. The maximum pressure is 70.3Pa, 35.4Pa and 17.2Pa at the frequency of 0.2Hz for each. channel height (50μm, 100μm and 200μm) and the maximum flow rate is 0.90×10^-1μl/min, 1.88×10^-1μl/min and 4.85×10^-1μl/min at the frequency of 0.4Hz for each channel height.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 117 (3), 170-174, 1997

  一般社団法人 電気学会

キーワード

• electrohydrodynamic(EHD)
• micropump
• induction type
• traveling electric fields

詳細情報

• CRID: 1390282679438005376
• NII論文ID: 10004832118
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.117.170
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 4150220
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4150220
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/117/3/117_3_170/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可