縦型ホール素子の特性と高感度化 Characteristics of Vertical Hall Cells and Improvement of Their Sensitivity

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This paper deals with detailed characteristics and improvement of the sensitivity of vertical Hall cells. The vertical Hall cells are useful devices for realizing a two-or three-dimensional magnetic sensor system because they can detect the magnetic field parallel to the chip surface. First, we focused on the behavior of the offset voltage of the vertical Hall cells which is the most important specification for a practical system. The experiments showed that there is an optimum geometry with respect to the offset voltage and the spatial resolution, and the offset stability with the applied stress of vertical Hall cells is 10 to 100 times as great as that of lateral Hall cells. Moreover, we attempted a drastic improvement of the sensitivity by using trench grooves to restrict the current path. As a result, a very high product sensitivity of 1230V/AT was obtained.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 117(7), 364-370, 1997-07 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004832273
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4237372
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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