For the Special Issue on MEMS Technology

• Sato Kazuo

  Dept. of Micro System Engineering, Nagoya University

Bibliographic Information

Other Title

• 「MEMS技術」-特集号の発行にあたって-
• MEMS ギジュツ トクシュウゴウ ノ ハッコウ ニ アタッテ

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 117 (8), 395-398, 1997

  The Institute of Electrical Engineers of Japan

Keywords

• Electrical and Electronic Engineering
• Mechanical Engineering

Details

• CRID: 1390001204461970944
• NII Article ID: 10004832324
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.117.395
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 4267500
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4267500
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/117/8/117_8_395/_pdf
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles