MEMS Development in a Past Decade and its Future Prospects (特集:MEMS技術) MEMS TechnologyMEMS Development in a Past Decade and its Future Prospects

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A history of microelectromechanical system(MEMS) research and development from 1987 is reviewed Major achievements in MEMS research are listed in the time sequence. The achievements include microacuators, microsensors, micro miniature motion-systems (e.g. microrobots), applications and the fabrication technology involved Future prospects of MEMS in contributing the 21th Century society are expected in three areas such as (1) wider distribution of and easier access to information, (2) making human activities more compatible with environment and (3) improvement in social welfare. The technological issues for future development of MEMS are also discussed.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 117(8), 401-406, 1997-08 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004832326
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    REV
  • ISSN
    13418939
  • NDL 記事登録ID
    4267502
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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