MEMS Development in a Past Decade and its Future Prospects

• Fujita Hiroyuki

  The University of Tokyo

Bibliographic Information

Other Title

• MEMS Development in a Past Decade and i

Abstract

A history of microelectromechanical system(MEMS) research and development from 1987 is reviewed Major achievements in MEMS research are listed in the time sequence. The achievements include microacuators, microsensors, micro miniature motion-systems (e.g. microrobots), applications and the fabrication technology involved Future prospects of MEMS in contributing the 21th Century society are expected in three areas such as (1) wider distribution of and easier access to information, (2) making human activities more compatible with environment and (3) improvement in social welfare. The technological issues for future development of MEMS are also discussed.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 117 (8), 401-406, 1997

  The Institute of Electrical Engineers of Japan

Keywords

• Microelectromechanical Systems (MEMS)
• Microactuator
• Micromachining
• Microsensors
• Application

Details

• CRID: 1390282679438680192
• NII Article ID: 10004832326
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.117.401
• ISSN: 13475525
• ISSN: 13418939
• ISSN: http://id.crossref.org/issn/00202878
• NDL BIB ID: 4267502
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4267502
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/117/8/117_8_401/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed