New Molding Technique Using Ultra-fine Particles for Realization of Three Dimensional Micro Structure

• AKEDO Jun

  Mechanical Engineering Laboratory, AIST/MITI

• ICHIKI Masaaki

  Japan Science and Technology Corporattion c/o MEL, AIST/MITI

• KIKUCHI Kaoru

  MEL, AIST/MITI

• MAEDA Ryutaro

  MEL, AIST/MITI

Bibliographic Information

Other Title

• New Molding Technique Using Ultra-fine

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 117 (8), 432-433, 1997

  The Institute of Electrical Engineers of Japan

Keywords

• Jet Molding
• Excimer Laser Ablation
• Micro fabrication
• mask-deposition
• PZT

Details

• CRID: 1390282679438662272
• NII Article ID: 10004832421
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.117.432
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 4267509
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4267509
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/117/8/117_8_432/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles