Preface to the Special Issue on "Fabrication Technologies of Inorganic Functional Thin Films for Sensors and Actuators"

• Hattori Tadashi

  DENSO Corporation

Bibliographic Information

Other Title

• 「センサ・アクチュエータ用無機機能性薄膜プロセス技術」-特集号の企画にあたって-
• トクシュウ センサ アクチュエータヨウ ムキ キノウセイ ハクマク プロセス

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 117 (10), 487-487, 1997

  The Institute of Electrical Engineers of Japan

Keywords

• Electrical and Electronic Engineering
• Mechanical Engineering

Details

• CRID: 1390001204461653248
• NII Article ID: 10004832570
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.117.487
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 4304104
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4304104
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/117/10/117_10_487/_pdf
• Data Source:
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  • CiNii Articles