Fabrication Technologies of Inorganic Functional Thin Films for Sensors and Actuators

• Hirano Shin-ichi

  Nagoya Uniersity

• Yogo Toshinobu

  Nagoya Uniersity

• Sakamoto Wataru

  Nagoya Uniersity

Bibliographic Information

Other Title

• センサ・アクチュエータ用無機機能性薄膜プロセス技術
• ゾルーゲルホウ ニヨル PTZ ハクマク ノ ゴウセイ ト ヒョウカ
• I. Synthesis and Characterization of PZT Thin Films by Sol-Gel Method
• I. ゾル-ゲル法によるPZT薄膜の合成と評価

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 117 (10), 488-491, 1997

  The Institute of Electrical Engineers of Japan

Keywords

• PZT

Details

• CRID: 1390001204461403136
• NII Article ID: 10004832571
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.117.488
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 4304105
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4304105
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/117/10/117_10_488/_pdf
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles