Jet-Printing-System法による圧電厚膜の形成 Preparation of Piezoelectric Thick Films by Jet-Printing-System Method

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Pb (Zr, Ti) O3 piezoelecteric thick films have been prepared on Pt/Cr/SiO2/Si by means of an improved jet printing system (JPS). X-ray diffraction (XRD) and scanning electron microprobe (SEM) analysis and measurements of electrical properties including dielectricity, ferroelectricity and piezoelectricity have been carried out on films. A very high depossition rate of 3μm/min and films with thickness above 100μm have been obtained without peeling. However, the films prepared in this fasion demonstrate lower piezoelectric behavior than bulk PZT ceramics. The reason for this has been explored by using element analysis.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 117(10), 507-512, 1997-10 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004832668
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4304109
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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