慣性駆動型マイクロマニピュレータの機構と駆動方法 [in Japanese] Mechanism and Driving Method of Inertial Driven Micromanipulator [in Japanese]
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This paper presents a mechanism and driving method of an Inertial Driven Micromanipulator. This micromanipulator utilizes our proposed Bending and Expanding Motion Actuator (BEMA). It provides both fine and coarse motion. Static bending and expanding motion of the BEMA realizes the flexible fine motion, and dynamic motion of the BEMA realizes the coarse motion. Thus, our micromanipulator has a wide dynamic range (±90 degree) and a high resolution (less than 10nm) with a simple mechanism. And this paper proposes fundamental principle of driving method for high speed motion. That is, controlling the impact timing against vibration of ineratial mass realizes the high speed motion of micromanipulator. We tested this driving method by experiment and simulation of sawtooth wave drive and pulse wave drive. And the results of it, new sawtooth wave driving method with controll of impact timing gives 2.0 times of motion speed than conventional method(without control of impact timing). Furthermore, new pulse wave driving method with controll of impact timing gives 5 times motion speed than conventional method.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 117(11), 545-553, 1997-11
The Institute of Electrical Engineers of Japan