慣性駆動型マイクロマニピュレータの機構と駆動方法 Mechanism and Driving Method of Inertial Driven Micromanipulator

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This paper presents a mechanism and driving method of an Inertial Driven Micromanipulator. This micromanipulator utilizes our proposed Bending and Expanding Motion Actuator (BEMA). It provides both fine and coarse motion. Static bending and expanding motion of the BEMA realizes the flexible fine motion, and dynamic motion of the BEMA realizes the coarse motion. Thus, our micromanipulator has a wide dynamic range (±90 degree) and a high resolution (less than 10nm) with a simple mechanism. And this paper proposes fundamental principle of driving method for high speed motion. That is, controlling the impact timing against vibration of ineratial mass realizes the high speed motion of micromanipulator. We tested this driving method by experiment and simulation of sawtooth wave drive and pulse wave drive. And the results of it, new sawtooth wave driving method with controll of impact timing gives 2.0 times of motion speed than conventional method(without control of impact timing). Furthermore, new pulse wave driving method with controll of impact timing gives 5 times motion speed than conventional method.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 117(11), 545-553, 1997-11 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004832729
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4323367
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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