Two thin film shape memory alloy microactuators

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The deposition and processing of thin film Shape Memory Alloy (SMA) is presented. By using sputterdeposition technique, 8 to 10μm thick films of TiNi were deposited. Among the features of the thin film SMA, the following can be noticed: large recovery strain; the relation between recovery strain and electrical resistance change of the TiNi alloy, allowing to use the TiNi as a position sensing element; long lifetime; large force-displacement product; high power-weight ratio; simple structural design; and low voltage operation. Therefore, a SMA two way loop actuator as well as a XY stage have been realized. Lift off technique is used to obtain the desired shape of two SMA microactuators. Two SMA cantilevers were folded up from the substrate and bound each other, making a three-dimensional loop. By activating each lever alternately, a SMA two-way actuator was realized. The dimensions of the loop actuator were 2mm in length and 600μm in height. The loop actuator has been successfully operated. It features repeatable motion up to 20Hz and maximum displacement of 300μm at 1Hz.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 117(11), 554-559, 1997-11 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004832740
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4323368
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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