High Voltage and High Resolution Surface Potential Imaging using Scanning Electrostatic Force Microscope (特集:特殊イメ-ジング技術) High Voltage and High Resolution Surface Potential Imaging using Scanning Electrostatic Force Microscope

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抄録

A newly developed technique for high voltage surface potential imaging having high resolution capability using Scanning Electrostatic Force Microscope(SEFM) is described. It can measure both electrostatic surface potential distribution of several hundred volts on the dielectric film and topography independently and simultaneously in high resolution of some tens of μm, in the air, quantitatively and without affecting charge distribution. The result of measuring surface potential distribution formed by spark discharge on a dielectric film is shown and compared to the results by a conventional electrostatic voltmeter and by toner method.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 117(12), 594-599, 1997-12-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004832807
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4353770
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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