Reduction of Microvalve Leakage based on Precise Measurement of Flow Conductance

• Hirano Motohisa

  NTT Integrated Information & Energy Systems Laboratories

• Yanagisawa Keiichi

  NTT Integrated Information & Energy Systems Laboratories

• Kuwano Hiroki

  NTT Integrated Information & Energy Systems Laboratories

• Nakano Satoko

  NTT Advanced Technologies Corp.

Bibliographic Information

Other Title

• Reduction of Microvalve Leakage based o

Abstract

This paper reports a reduction of microvalve leakage according to precise measurements of the leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of a cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8×10^-10Pa⋅m³/s and a flow rate ranging from 5.8×10^-10 to 3.2×10^-4Pa⋅m³/s.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 117 (12), 622-626, 1997

  The Institute of Electrical Engineers of Japan

Keywords

• microvalve
• micromachine

Details

• CRID: 1390001204461476864
• NII Article ID: 10004832846
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.117.622
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 4353775
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4353775
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/117/12/117_12_622/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed