2方向動作静電アクチュエータ On a Bi-directional Driving Electrostatic Actuator

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We propose a bi-directional driving electrostatic actuator which has multiple parallel plate electrodes. The actuator generates a large force that is twice as much as the force of a conventional uni-directional driving actuator. In this paper, we describe the driving theory and its experimental verification. To verify the driving theory, a micro actuator is fabricated by a reactive ion etching process with an piece of SOI wafer. The experimental results on a voltage-displacement curve and a resonance agree with the theoretical calculation results. We also propose the modified driving method to increase the sensitivity around 0-displacement. According to this study, we can conclude that a bi-directional driving electrostatic actuator is very useful for driving optical switches, magnetic head elements of hard disk drives and so on.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 117(12), 633-636, 1997-12-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004832860
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4353777
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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