Theoretical Analysis of Cantilever Motion under Electrostatic Force

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A motion of an electrostatic micromechanism with a cantilever movable electrode and a counter fixed electrode was studied theoretically by using the Rayleigh-Ritz method. As trial functions which express deformation states of the movable electrode approximately, deflection lines under applications of various uniform loads to the movable electrode were selected. In non-contact states of the movable electrode with the counter electrode, a hysteresis was confirmed in displacement (of the movable electrode)-applied voltage (between the both electrodes) curves of a voltage increasing and a voltage decreasing process. In contact states of the both electrodes, a hysteresis didn't appear in contact area-voltage curves and a threshold voltage above which a contact area increases rapidly with an increase of the applied voltage was derived. The threshold voltage, which determines an operation voltage of the mechanism, was almost proportional to L<sup>-2</sup>, T<sup>3/2</sup> and d<sub>0</sub> (L, T: the length and the thickness of the movable electrode, respectedly, d<sub>0</sub>: the gap width between the movable and the counter electrode).

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 118(1), 6-13, 1998-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004832890
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4366748
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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