薄膜全域空燃比センサ THIN-FILM WIDE-RANGE AIR-FUEL RATIO SENSOR
A thin-film wide-range air-fuel ratio sensor has been fabricated on a porous alumina substrate. The sensor consisted of an oxygen pump cell and a limiting-current cell on the substrate. These cells were laminated in the order, Pt/ZrO<sub>2</sub> electrolyte/Pt/ZrO<sub>2</sub> electrolyte/Pt by sputtering technique. In this sensor, the oxygen pump cell served to supply oxygen to the limiting-current cell as substitution for air introduction. The limiting-current cell with a constant applied voltage of 0.6V showed a continuous output characteristic corresponding to air ratio of 0.7-1.5. The use of the oxygen pump cell has made it possible to eliminate air introduction and the changeover of the polarity of the applied voltage to the limiting-current cell.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 118(2), 80-85, 1998-02
The Institute of Electrical Engineers of Japan