プラズマ有機薄膜による環境ガスセンシング [in Japanese] Environmental Gas-Sensing Using Plasma-Deposited Organic Films [in Japanese]
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This paper represents the gas-sensing capabilities of quartz crystal microbalance (QCM) devices coated with plasma-deposited organic films for detection of environmentally problematic compounds of chlorocarbons: chloromethanes and chloroethylenes. Plasma-deposited organic films are prepared by sputtering of amino-acids and fluoropolymers. Both types of the films shows the opposite gas-sorption characteristics; the amino-acid films have high affinities for lowly chlorinated carbons, and the fluoropolymer films show large sorption capacities for highly chlorinated carbons. These tendencies can be physicochemically interpreted by Linear Solvation Energy Relationships. The 0.5-ppm tetrachloroethylene and trichloroethylene vapors can be detected by the amino-acid-film-coated QCMs, even though they have low cross sections for highly chlorinated carbons.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 118(2), 86-91, 1998-02
The Institute of Electrical Engineers of Japan