Co_3O_4-Fe_2O_3複合体を用いた酸化物半導体センサの検知特性 Nitrogen Oxides Sensing Properties of Oxide-Semiconductor Sensors

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Semiconductor gas sensors having a combination of p- and n-type oxides have been investigated for detecting a small amount of NO. Among 16 kinds of p-n combinations tested, the Co<sub>3</sub>O<sub>4</sub>-Fe<sub>2</sub>O<sub>3</sub> composite sensor exhibited excellent sensing properties to NO at 300°C. When the Co<sub>3</sub>O<sub>4</sub> content in the composite was set to 20wt%, the sensitivity to 50 ppm NO was the maximum as high as 2.8, while that to 50 ppm NO<sub>2</sub> was 1.5, indicating the highly sensitive and selective nature to NO. Further, the sensor showed the almost linear correlation between logarithm of NO sensitivity and that of NO concentration in the range of 5-100 ppm NO. These results suggest that the Co<sub>3</sub>O<sub>4</sub>-Fe<sub>2</sub>O<sub>3</sub> composite sensor can be a candidate of NO sensor for combustion monitoring. The addition of Co<sub>3</sub>O<sub>4</sub> promoted the formation of NO<sup>-</sup> adsorbate on the composite surface, resulting in the high NO sensitivity.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 118(2), 125-129, 1998-02 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004833186
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4392295
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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