NOx Sensor Using Multi-Layered Semiconducting Thin-Film (特集 環境ガスセンサ) NOx Sensor Using Multi-Layered Semiconducting Thin-Film

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We have developed a NO<sub>x</sub> sensor using a multi-layered semiconducting thin-film. The first layer (current conduction region) is composed of Fe<sub>2</sub>O<sub>3</sub> (91mol%), TiO<sub>2</sub> (5mol%) and MgO (4mol%), and the second layer (gas sensitive region) is composed of SnO<sub>2</sub> (96mol%) and V<sub>2</sub>O<sub>5</sub> (4mol%). The resistance of the sensor increases when it is placed in an air including NO or NO<sub>2</sub>. The sensor is thus sensitive to both NO and NO<sub>2</sub>. By doping the SnO<sub>2</sub> layer with V<sub>2</sub>O<sub>5</sub> (4mol%), the operating temperature decreases and the sensitivity increases for these gases. The sensor detects NO<sub>x</sub> at a concentration as low as a few ppm at a relatively low temperature of 200°C. The response times of the sensor to NO and NO<sub>2</sub> are 60s and 80s at 350°C, respectively, though they are longer at lower temperatures. The sensor is also sensitive to reducing gases such as C<sub>3</sub>H<sub>8</sub>, <i>i</i>-C<sub>4</sub>H<sub>10</sub>, C<sub>2</sub>H<sub>4</sub>, CO, and H<sub>2</sub>. These reducing gases, however, can be distinguished from NO<sub>x</sub> because the resistance of the sensor decreases in these gases. The sensitivity does not degrade for at least 3 months when it is periodically cleaned by a heat treatment at 500°C for 1h.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 118(2), 136-140, 1998-02 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004833219
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4392297
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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