NOx Sensor Using Multi-Layered Semiconducting Thin-Film

• Hiwatari Tadao

  Tokyo Denki University

• Hara Kazuhiro

  Tokyo Denki University

書誌事項

タイトル別名

• NO_x Sensor Using Multi-Layered Semiconducting Thin-Film
• NOx Sensor Using Multi-Layered Semicond

抄録

We have developed a NO_x sensor using a multi-layered semiconducting thin-film. The first layer (current conduction region) is composed of Fe₂O₃ (91mol%), TiO₂ (5mol%) and MgO (4mol%), and the second layer (gas sensitive region) is composed of SnO₂ (96mol%) and V₂O₅ (4mol%). The resistance of the sensor increases when it is placed in an air including NO or NO₂. The sensor is thus sensitive to both NO and NO₂. By doping the SnO₂ layer with V₂O₅ (4mol%), the operating temperature decreases and the sensitivity increases for these gases. The sensor detects NO_x at a concentration as low as a few ppm at a relatively low temperature of 200°C. The response times of the sensor to NO and NO₂ are 60s and 80s at 350°C, respectively, though they are longer at lower temperatures. The sensor is also sensitive to reducing gases such as C₃H₈, i-C₄H₁₀, C₂H₄, CO, and H₂. These reducing gases, however, can be distinguished from NO_x because the resistance of the sensor decreases in these gases. The sensitivity does not degrade for at least 3 months when it is periodically cleaned by a heat treatment at 500°C for 1h.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 118 (2), 136-140, 1998

  一般社団法人 電気学会

キーワード

• NO_x sensor
• Gas sensor
• Thin film
• Fe₂O₃
• SnO₂

詳細情報

• CRID: 1390001204460404736
• NII論文ID: 10004833219
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.118.136
• ISSN: 13475525
• ISSN: 13418939
• ISSN: http://id.crossref.org/issn/13418939
• NDL書誌ID: 4392297
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4392297
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/118/2/118_2_136/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可