Fabrication of New Planar-Type Microsensor Attached with Spin-Coated Thin Film of Tin Dioxide and Its Thermal and CO Sensing Characteristics (特集 環境ガスセンサ) Fabrication of New Planar-Type Microsensor Attached with Spin-Coated Thin Film of Tin Dioxide and Its Thermal and CO Sensing Characteristics

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A new planar-type microsensor in which a gas-sensing layer was surrounded by a platinum heater horizontally on the same plane of a diaphragm was fabricated by a simple silicon micromachining technique using only 3 masks for photolithography. The gas sensing layer of SnO<sub>2</sub> or Sb-doped SnO<sub>2</sub> was spin-coated from each sol solution and trimmed into the designated dimensions by chemical etching with an aqueous HI solution. Computer simulation of thermal properties showed that the uniformity of temperature over the sensing layer was fairly good as expected, although there were some discrepancies between the temperatures of the sensing layer simulated and observed under given heater power conditions because of the simplified simulation model used. The fabricated microsensor proved a fairly good performance for sensing CO gas in air at 250°C.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 118(2), 147-153, 1998-02 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004833242
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4392299
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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