Ultraminiature Sensor for Thermal Analysis with an Air-Bridge Type Microheater
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An ultraminiature sensor for thermal analysis is fabricated using micromachining technique and its fundamental characteristics are obtained. This device consists of monolithically integrated components of an air-bridge type microheater, a thin film thermocouple and a sample-holder. Boiling points of liquid samples, water and methanol, are clearly observed in the heating curve and the heating-rate curve, and sudden decrease of the temperature at the dropping time of the liquid sample without heating due to the effect of evaporation heat is also observed.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 118(3), 183-186, 1998-03-01
The Institute of Electrical Engineers of Japan