静電型マイクロアクチュエータの弾性変形の解析 [in Japanese] An Analysis of the Elastic Deformation of an Electrostatic Microactuator [in Japanese]
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A scratch drive actuator (SDA), which consisted of a bushing and a plate, was one example of an electrostatic microactuator. We analysed an elastic deformation of the SDA. The analytic method of an elastic deformation caused by the electrostatic force is described. The elastic energy and the electrostatic energy were used to calculate the elastic defromation of the SDA. The obtained results were used to explain a theoretical microstep of the SDA. The method we described is applied to analyse the elastic deformation of the electrostatic microactuators.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 118(3), 205-211, 1998-03-01
The Institute of Electrical Engineers of Japan