An Analysis of the Elastic Deformation of an Electrostatic Microactuator

• Hayakawa Kazuaki

  Aichi Institute of Technology

• Torii Akihiro

  Aichi Institute of Technology

• Ueda Akiteru

  Aichi Institute of Technology

Bibliographic Information

Other Title

• 静電型マイクロアクチュエータの弾性変形の解析
• セイデンガタ マイクロアクチュエータ ノ ダンセイ ヘンケイ ノ カイセキ

Abstract

A scratch drive actuator (SDA), which consisted of a bushing and a plate, was one example of an electrostatic microactuator. We analysed an elastic deformation of the SDA. The analytic method of an elastic deformation caused by the electrostatic force is described. The elastic energy and the electrostatic energy were used to calculate the elastic defromation of the SDA. The obtained results were used to explain a theoretical microstep of the SDA. The method we described is applied to analyse the elastic deformation of the electrostatic microactuators.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 118 (3), 205-211, 1998

  The Institute of Electrical Engineers of Japan

Keywords

• 精密変位
• 弾性変形
• 静電エネルギー
• 弾性エネルギー
• エネルギー平衡

Details

• CRID: 1390001204462664704
• NII Article ID: 10004833349
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.118.205
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 4413382
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4413382
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/118/3/118_3_205/_pdf
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed