シリコン振動型角速度センサ A Silicon Micromachined Resonant Angular Rate Sensor

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A silicon resonant angular rate sensor (gyroscope) with ring - disk - shaped resonator was fabricated using silicon bulk micromachining and its properties were investigated. The sensor consists of a glass-silicon-glass structure. The ring - disk - shaped silicon resonator has 3300μm×3100μm size and 30μm-thick. The resonator is suspended by four beams, and the ends of beams are anchored to a support which is in the center of the ring. The silicon structure was machined by alkali etching and reactive ion etching. Driving the resonator and detecting the vibration are performed by electrostatic forces and capacitive changes between the silicon resonator and electrodes on the glass. The resonant frequencies of the test device were 4.2kHz in driving mode and 3.5kHz in detecting mode. Although the difference in resonant frequencies between two modes was about 20%, a noise-equivalent rate of 3deg./sec was obtained at 7 Pa.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 118(3), 212-217, 1998-03-01

    The Institute of Electrical Engineers of Japan

参考文献:  6件中 1-6件 を表示

被引用文献:  2件中 1-2件 を表示

  • 薄膜Ni-W合金の諸特性について

    池田 英広 , 井奥 淳 , 藤田 孝之 , 前中 一介 , 前田 宗雄

    電気学会研究会資料. SMP, センサ材料・プロセス技術研究会 1998(10), 31-36, 1998-11-05

    参考文献11件

  • 回転振動形ジャイロスコープに関する基礎研究

    藤田 孝之 , 波多野 健太 , 水野 卓也 , 前中 一介 , 前田 宗雄

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 119(8), 411-416, 1999-08

    J-STAGE DOI 参考文献14件 被引用文献1件

各種コード

  • NII論文ID(NAID)
    10004833357
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4413383
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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