Fabrication and Characterization of a Silicon Capacitive Structure for Simultaneous Detection of Acceleration and Rotation Rate

• MIZUNO J.

Journal

• Proc. The 8th Int. Conf. on Solid-State Sensors and Actuators

  Proc. The 8th Int. Conf. on Solid-State Sensors and Actuators 679-682, 1995

Details

• CRID: 1571698599188895744
• NII Article ID: 10004833396
• Data Source:
  • CiNii Articles