光学式変位センサを用いた三次元測定機用微小接触プローブの試作 Fabrication of Small Touch Probe for Coordinate Measuring Machine using Optical Displacement Sensor

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In recent years there has been growing commercialization of small size devices. The present work describes the method of three-dimensional measuring for small parts by low contact force. Small touch probe consists of quartz sphere (φ0.125mm), stylus (ength 2mm, φ0.lmm), cross sheet (thickness 0.01mm, width 1.25mm) and optical displacement sensor. Touch probe was able to detect the coordinate from transformation of cross sheet center, which was generated at the contact point. Probe touched the object surface, and x, y and z numerical values were obtained. Being employed ring gage, as test specimens, the standard deviation was 1μm.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 118(4), 240-245, 1998-04-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004833402
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4436842
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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