Cross Type PSD Sensor for Position Error and Rotation Angle of Target Hole

• Hayakawa Soichiro

  Toyota Technological Institute

• Tsuchida Nuio

  Toyota Technological Institute

• Imai Koji

  Toyota Technological Institute

• Tanaka Asao

  Hamamatu Photonics

Bibliographic Information

Other Title

• 十字型位置検出素子による対象穴の位置誤差・傾き角検出センサ

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 118 (6), 339-340, 1998

  The Institute of Electrical Engineers of Japan

Keywords

• 十字型位置検出素子
• 位置センサ
• 傾き角センサ

Details

• CRID: 1390282679437478016
• NII Article ID: 10004833593
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.118.339
• ISSN: 13475525
• ISSN: 13418939
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/118/6/118_6_339/_pdf
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles