Micro-Actuators Using Acoustic Streaming Induced by High-Frequency Ultrasonic Waves

• Ikekame Kotaro

  Chiba University

• Hashimoto Ken-ya

  Chiba University

• Yamaguchi Masatsune

  Chiba University

書誌事項

タイトル別名

• Micro-Actuators Using Acoustic Streamin

抄録

The irradiation of ultrasonic waves to liquid causes liquid flow toward the propagation direction of the ultrasonic waves. This paper proposes the application of this phenomenon, called acoustic streaming, to the development of micro-actuators such as micro-manipulators for small particles and micro-pumps for liquid. Since high-frequency ultrasonic waves induce acoustic streaming very efficiently only in the vicinity of the transducer, micro-manipulators are shown to be realised by using a two-dimensional ultrasonic transducer array and controlling electrical power supplied to each transducer. It is also concluded that micro-pumps could be developed by combining a transducer array with a topographic channel structure for liquid flow.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 118 (7-8), 347-351, 1998

  一般社団法人 電気学会

キーワード

• acoustic streaming
• ultrasonic transducer
• micromachine
• manipulator
• micropump

詳細情報

• CRID: 1390282679437481472
• NII論文ID: 10004833601
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.118.347
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 4496661
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4496661
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas1995/118/7-8/118_7-8_347/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
  • Crossref
  • CiNii Articles
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