Micro-Actuators Using Acoustic Streaming Induced by High-Frequency Ultrasonic Waves

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抄録

The irradiation of ultrasonic waves to liquid causes liquid flow toward the propagation direction of the ultrasonic waves. This paper proposes the application of this phenomenon, called acoustic streaming, to the development of micro-actuators such as micro-manipulators for small particles and micro-pumps for liquid. Since high-frequency ultrasonic waves induce acoustic streaming very efficiently only in the vicinity of the transducer, micro-manipulators are shown to be realised by using a two-dimensional ultrasonic transducer array and controlling electrical power supplied to each transducer. It is also concluded that micro-pumps could be developed by combining a transducer array with a topographic channel structure for liquid flow.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 118(7), 347-351, 1998-07-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10004833601
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    4496661
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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